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Author	Leondes, Cornelius T.
Title	MEMS/NEMS Handbook Techniques and Applications V.1 / Cornelius T. Leondes
ISBN	978-038-72-4520-1
Imprint	New York : Springer, 2005
Call Number	TK153 L579M
Physical	380 p.
Subject	Nanotechnology
Subject	Microelectromechanical systems--Design and construction.

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Author [Leondes, Cornelius T.]

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