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LEADER 01174nam 2200277 a 4500
001 4167
003 TNI Library
008 030417s20069999caua b 000 0 eng
020 ^a9781860944932
050 0 ^aTK7875^bG273S
100 1 ^aGaura, Elena
245 10 ^aSmart MEMS and Sensor Systems /^cElena Gaura
260 ^aLondon :^bImperial College Press,^c2006
300 ^a539 p. :^bill.
650 0 ^aMicroelectromechanical systems
650 0 ^aSmart structures
650 0 ^aMicro-Electrical-Mechanical Systems
700 1 ^aKraft, Michael
700 1 ^aNewman, Robert
913 ^aImported by ULIBM Administrator
945 ^p0^l0^i200700207
949 ^aImport form external file by ULIBM system

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Subject [Microelectromechanical systems]

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4167

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