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Title	Thin-film and depth-profile analysis / edited by H.Oechsner ; with contributions by H.W. Etzkorn ... [et al.]
ISBN	354-013-320-8
Imprint	Berlin ; New York : Springer-Verlag, 1984
Call Number	QC176.84.S93 T46
Physical	xi, 205 p. : ill.
Subject	Thin films--Surfaces
Subject	Surface chemistry
Subject	Sputtering (Physics)
Coorperative Author	Oechsner, H. (Hans)
Coorperative Author	Etzkorn, H. W.

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